Engineering & Science Associates Co., Ltd. 902B ABSOLUTE PIEZO VACUUM TRANSDUCER
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902B ABSOLUTE PIEZO VACUUM TRANSDUCER  
รหัส : MKS 902B
ยี่ห้อ : MKS
รุ่น : 902B
รายละเอียดย่อ :
The MKS 902B Piezo transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B provides economical, absolute pressure measurement that is independent of gas type.
รายละเอียดทั้งหมด :

 

902B ABSOLUTE PIEZO VACUUM TRANSDUCER
(0.1 to 1000 Torr)
Pressure/vacuum gauges with MEMS-based Piezo sensors


The MKS 902B Piezo transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B provides economical, absolute pressure measurement that is independent of gas type.

FEATURES & BENEFITS:

  • Low cost transducer alternative to more expensive conventional transducers
  • Gas independent pressure measurement for accurate, total pressure measurement
  • Sensor is suitable for harsh processes due to robust design and stainless steel construction
  • Solid state Piezo sensor resistant to damage from air inrush and vibrations
  • Compact system design with integrated electronics and sensor in one unit
  • Mountable in any orientation for ease of installation
  • Reduced process cycle time due to sensor’s fast, accurate and repeatable pressure measurements
  • Ease of operation with both analog output and digital communication
  • Multiple analog output emulations available
  • Process control with up to three setpoint relays with fast response time
  • Optional display version

APPLICATIONS:

With a measurement range of 0.1 to 1000 Torr full scale, the 902B sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace.



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