Engineering & Science Associates Co., Ltd. 925 MICRO PIRANI™ VACUUM TRANSDUCER
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925 MICRO PIRANI™ VACUUM TRANSDUCER  
รหัส : MKS 925
ยี่ห้อ : MKS
รุ่น : 925
รายละเอียดย่อ :
The 925 Micro Pirani™ vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 Micro Pirani™ offers analog voltage output, digital interface and set point relays for process controlling.
รายละเอียดทั้งหมด :

 

925 MICRO PIRANI™ VACUUM TRANSDUCER
(1.0x10-5 Torr to Atmosphere)
Pressure/vacuum gauges with MEMS-based Micro Pirani™ vacuum sensors


photo - 925 MicroPirani Vacuum Transducer

The 925 Micro Pirani™ vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 Micro Pirani™ offers analog voltage output, digital interface and set point relays for process controlling.

FEATURES & BENEFITS:

  • Increased measurement range from 10-5 Torr to Atmosphere, two decades beyond a standard Pirani
  • Analog output and digital communication
  • Mountable in any orientation
  • Three optional set point relays for process control
  • Optional local display

APPLICATIONS:

The 925 Micro Pirani™ vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:

  • General vacuum pressure measurement
  • Foreline and roughing pressure measurement
  • Gas backfilling measurement and control
  • Mass spectrometer control
  • Activation of UHV gauges
  • System process control (interlocks, valves, pumps)
  • Control system pressure

The 925 Micro Pirani™ vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software.



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