Engineering & Science Associates Co., Ltd. Mass flow controller
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รหัส : MKS P250A
P250A High Performance, High Flow Mass Flow Controllers for Flow Rates up to 250 slm
The P250A MFC is a metal-sealed, multi-gas/multi-range mass flow controller capable of ranges from 100 to 250 slm Nitrogen Full Scale flow with a unique control valve design for rapid setpoint response while maintaining closed conductance leak rates well below other high flow MFCs. The P250A, with fast settling time (less than 2 seconds) and one (1) percent of setpoint accuracy outperforms other typical high flow MFCs. The device's control capability extends down to 2% of the P250A's configured full scale. This, combined with the P250A's multi-gas/multi-range capability extends the user's ability to minimize high flow MFC inventory.


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รหัส : MKS P9B
P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm
The P9B pressure insensitive, multi-gas/multi-range mass flow controller features sub-750 millisecond control times and accuracy to within 1% of setpoint over a broad range of process gases, from "light" gases such as helium to "heavy" gases like SF6. P9B is a true multi-range/multi-gas MFC, minimizing MFC inventory requirements.


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รหัส : MKS P4B
P4B MFC High Performance Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm
The P4B MFC is the next generation of multi-gas/multi-range mass flow controllers designed to meet critical gas flow control requirements for accuracy and speed of response while minimizing mass flow controller inventory requirements. P4B MFC multi-gas/multi-range capabilities are enabled with gas parameters already stored in memory which provide 1% of setpoint accuracy for the user selected gas. Configuring a gas and range is easily done through an Ethernet interface with no special software - only a PC and an internet browser are needed.


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รหัส : MKS P2
P2 MFC High Performance Metal-sealed Mass Flow Controllers for Very Low Pressure Drop Applications
The MKS Instruments P2A MFC Low Pressure Thermal Mass Flow Controller is a multi-gas, multi-range metal sealed mass flow controller designed specifically for applications where low pressure drop across the controller is critical. Applications include controlled delivery of Safe Delivery Source (SDS®) gases in ion implant applications to maximize the utilization of the SDS® source gas. Inlet pressures as low as 4 torr are possible.


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รหัส : MKS IE1000A
IE1000A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 500 to 1000 slm
The IE1000A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential.

The IE1000A can be ranged from 501 to 1000 slm (N2 equivalent). This broad flow range is enabled by the unique control valve design, which responds rapidly to setpoint changes while maintaining closed conductance leak rates that are well below other high flow mass flow controllers.


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รหัส : MKS IE500A
IE500A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm
The IE500A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential.

The IE500A can be ranged from 250 slm to 500 slm (N2 equivalent). This broad flow range is enabled by the unique control valve design, which responds rapidly to setpoint changes while maintaining closed conductance leak rates that are well below other high flow mass flow controllers.


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รหัส : MKS IM250
IM250 IP66-rated, High Flow, Multi-gas, Multi-Range, Metal-sealed Mass Flow Controllers for Flow Rates up to 250 slm
The MKS IM250 Multi-gas, Multi-range, IP66-rated, Metal-sealed, Digital Mass Flow Controller for Flow Rates up to 250 slm is designed for use in harsh environments where resistance to liquid or dust ingress are essential.

The IM250 can be ranged from 100 to 250 slm Nitrogen Full Scale flow. This broad range is enabled by the IM250's unique control valve design, which provides rapid setpoint response while maintaining closed conductance leak rates - well below other typical high-flow MFCs.


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รหัส : MKS IE250A
IE250A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Industrial Environments for Flow Rates up to 250 slm
The IE250A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential.

The IE250A can be ranged from 100 to 250 slm (N2 equivalent). The IE250 is available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.


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รหัส : MKS IM50A
IM50A IP66-rated, Multi-gas, Multi-range Metal-sealed Mass Flow Controllers for Flow Rates up to 50 slm
The IM50A Mass Flow Controller & Mass Flow Meter are a general purpose, metal-sealed MFC with flow control capability from 5 sccm to 50 slm Full Scale, N2 equivalent. It incorporates the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.


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รหัส : MKS IE50A
IE50A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controllers for Flow Rates up to 50 slm
The IE50A Mass Flow Controller is a general purpose, elastomer-sealed MFC with flow control capability from 5 sccm to 50 slm Full Scale, N2 equivalent. It incorporates the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.


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