Engineering & Science Associates Co., Ltd. Ozone Product
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OZONE SANITIZATION (2) Dissolved Ozone Delivery Systems (5)


MKS offers a complete spectrum of ultra clean, highly reliable ozone generation, delivery and accessory products. The ozone product family includes compact, high concentration ozone generators, closed-loop controlled ozone gas delivery subsystems, state-of-the-art, high concentration dissolved ozone liquid delivery subsystems and ozone accessories for flow mixing and ozone destruction.
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พบสินค้า 7 รายการ

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รหัส : MKS EO3™
EO3™ Ozone Sanitation Generators & Systems
EO3™ Ozone Sanitation Generators & Systems provide 0.5-3 pounds per day of ozone for sanitization needs. Designed specifically for challenging environments such as food & beverage and biopharmaceutical industries, this cost-effective, high-quality ozone generator has been successfully used around the world for nearly 10 years.


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รหัส : MKS LIQUOZON® ULTRA
LIQUOZON® ULTRA Ozone Sanitization of DI Water Loop and Storage Tank
The LIQUOZON® Ultra ozonated DI water unit is an automated ozone injection system used for the sanitization of process water systems, storage tanks and distribution lines. The LIQUOZON® Ultra system provides a clean, safe and efficient alternative to chemical water treatment systems enabling you to minimize your operating costs and maximize uptime.


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รหัส : MKS LIQUOZON® STREAM
LIQUOZON® STREAM High Output 140 slm Ozone Water Delivery System
LIQUOZON® Stream Ozonated Water Delivery System is a powerful source of dissolved ozone for wet wafer processing especially in multi-chamber single wafer tools with applications requiring up to 140 lpm flow and ozone concentrations of 115 - 25 ppm.


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รหัส : MKS LIQUOZON® HELIO3
LIQUOZON® HELIO3 Modular Dissolved Ozone Delivery System
The LIQUOZON® HeliO3 is specially designed for solar applications such as cleaning, surface conditioning and oxide growth. The ozonated water delivery system is a powerful source for wet processing with ozone and/or chemical mixtures such as acids with ozone.


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รหัส : MKS LIQUOZON® PRIMO3
LIQUOZON® PRIMO3 Ozonated Water Delivery System with Optional Recirculation
LIQUOZON® PrimO3 Ozonated Water Delivery System is a powerful source for wet wafer processing with ozone, especially in multi chamber single wafer tools. An optional pump at the DIO3 outlet allows subfloor installation and a pressurized recirculation loop. Moreover, the reclaiming of unused pressureless DIO3 is possible with the new 'ReClaim' option.


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รหัส : MKS LIQUOZON® SINGLE
LIQUOZON® SINGLE Compact 20 slm Ozone Water Delivery System
The LIQUOZON® Single, the most compact member of the MKS LIQUOZON® family of ultra-pure ozonated water (DIO3 water) generators, was specifically designed to supply DIO3 water to single-wafer cleaning tools.


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รหัส : MKS LIQUOZON® SMART
LIQUOZON® SMART High Output 50 slm 3 channel Ozone Water Delivery System
The LIQUOZON® Smart ozonated water delivery system is a self-contained unit that provides DIO3 water (ultra pure ozonated water) with exceptionally high, accurate and stable ozone concentration utilizing constant pressure.


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