Flow Ratio Controllers

Flow Ratio Controllers

Optimizing process performance just became easier with the DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to different zones in a process chamber. Send the DELTA™ Flow Ratio Controller (FRC) a gas - or any mixture - and a ratio set point and the DELTA™ Flow Ratio Controller (FRC) will divide the gas into separate output channels automatically.