P-Series High Performance Multi-gas

P-Series High-Performance Multi-gas, Multi-range Thermal Mass Flow Controllers

P-Series, high-performance mass flow controllers are designed for the most critical process applications where accuracy, repeatability as well as pressure insensitivity are requirements.

Common Features:

• Metal-sealed MFC/MFM; 1.125 inches (28.6 mm) width
• Full-scale MFC flow rates from 5 sccm to 250 slm
• Multi-gas/multi-range MFC with pressure insensitive option; 1% of setpoint accuracy
• Pressure insensitive option
• Digital & analog I/O