Compact, General Purpose Thermal Mass Flow Controllers

Compact, General Purpose Thermal Mass Flow Controllers

The MF1's compact size (less than 4 inches high, 3 inches long, 1 inches wide) provides an option where available space is limited such as in many analytical and sputter applications. While small in stature, the elastomer-sealed MF1 offers excellent accuracy and repeatability.

Common Features:

• Elastomer-sealed MFC
• Full-scale flow rates from 10 sccm to 20 slm
• Multi-gas/multi-range MFC
• Digital and analog I/O