Vacuum Isolation Valves
Vacuum Isolation Valves
| Image | Model | Description |
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LoPro™ (Low-profile) | MKS LoPro™ (Low-profile) Vacuum Valves have a small footprint that fits easily into existing, and new, vacuum systems. LoPro™ Valves are extremely reliable, with a lifetime that can extend to 1,000,000 cycles under clean conditions, greatly increasing system uptime. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions that extends the valves life cycle over a conventional O-ring shaft sealed valve. The bellows' stroke length is optimized to assure a long cycle life while maintaining high conductance. |
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LoPro™ - Aluminum | MKS LoPro™ (Low-profile) Aluminum Body Vacuum Valves have all the features of a LoPro Valve with a one-piece machined aluminum body made of 6061-T6 Aluminum for applications that require low weight or reduction of exposed Stainless Steel. |
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LoPro™ Two-Stage | MKS LoPro™ Two-Stage valves achieve a soft pumpdown and vacuum system isolation in one common housing. A small bypass valve is integrated into the main isolation valve, simplifying setup and reducing costs. With the integrated soft pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage. The bypass valve is user adjustable by selecting a micrometer or thumb screw adjustment option. Additionally, a fixed flow orifice can be sized for the application that is housed internal to the valve to prevent unwanted adjustment. |
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Cv™ Compact |
MKS Cv™ Valves are compact in size and are suited for use in gauge isolation, roughing, bypass, or venting lines. The formed bellows design is reliable and achieves high conductance for its compact size. Multiple configurations are available including manual or pneumatic controlled with interface ports ranging from KF and CF to VCR and weld fittings. Manual valves are available with a conductance limiting needle design for adjustable flows. For electromagnetic operations refer to the MKS Electromagnetic ECv series. |
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CRV Corrosion & Ozone Resistant |
Corrosion Resistant Valves (CRV) are designed for use in harsh vacuum environments. The Corrosion Resistant Valve employs a patented technology that isolates the valve bellows while in the open position. Bellows protection is accomplished with an Aluminum or Stainless Steel shield on the exterior of the formed bellows. In the open position the shield is sealed internally with an O-ring to prevent chemicals from attacking the bellows. An umbrella valve (vent valve) is optional and can be used to exhaust trapped gases in the volume between the shield and the bellows. The Corrosion Resistant Valve is designed to be heated which further reduces particle buildup internal to the valve. |
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High Cycle Valves (HCV) 10 Million Cycle Life |
MKS High Cycle Valves (HCV) are high performance vacuum isolation valves designed specifically for long cycle life in demanding applications. It has a specially designed formed bellows and pneumatic actuator to extend cycle life to 10,000,000 cycles in clean environments. |
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ECv Electromagnetic Compact |
Electromagnetic compact vacuum valves (ECv) have the same high conductance bellows sealed performance of the Cv Valves, with electrically controlled operation in place of pneumatic or manual control. The ECv valve is operated by a DC powered linear solenoid that serves as the valve actuator and a spring provides safety return when power is removed. Each ECv valve includes a coil saver circuit integrated in-line with the input power cable. The coil saver circuit offers efficient solenoid operation by limiting the power usage of the solenoid once the valve has been actuated. This allows the valve to operate without excessive heat generation and reduces power consumption. |
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Ball Valves For Vacuum Use |
MKS Vacuum Ball Valves are designed to have a straight-thru flow path and are less sensitive to particulate contamination than other vacuum valve styles. The ball is contained in a central vacuum cavity and is opened and closed by turning the stem 90° back and forth (1/4 turn). The sealing seat for the ball wipes the ball clean as it is opened and closed. This feature provides a "self-cleaning" action that makes MKS Ball Valves effective in particle-rich effluent streams. The MKS ball valve design has a fully stabilized stem that eliminates stem leaks common to lower performance ball valves. Also available in a 3-way, L-port, style that diverts flow from either of two inlet ports to a single, common outlet port. |
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Ultra-high Vacuum (UHV) Metal-Sealed to Atmosphere |
MKS Ultra High Vacuum (UHV) Valves are specially designed with Con-flat (CF) metal bonnet seals that limits outgassing and permeation allowing a lower system base pressure. A welded stainless steel bellows ensures a long cycle life with high conductance at the lowest base pressures. The UHV Valve's lifetime can extend to 1,000,000 cycles under clean conditions, increasing system uptime. The UHV Valve is assembled in a clean room for use in ultraclean system environments. The body is available with a choice of bead blasted or electropolished finishes. |
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Jalapeño Series Heated Valves |
Jalapeño heated vacuum valves are specifically designed to withstand high internal temperatures, limiting contaminant buildup and reduce system maintenance. The standard heater for the Jalapeño valve is set to 170°C to achieve a nominal interior temperature of 150°C, but other temperature ranges are optional. From room temperature, the heaters typically reach their set temperature in less than 30 minutes and can be daisy-chained with integral locking connectors. The heaters are wired in parallel and are independently controlled. Jalapeño valves use up to four heat zones, reducing any potential for hot and cold spots. Since each heater is designed to uniformly heat a component, there is no need for costly controllers or thermocouples with messy wires. The legacy lines of MKS Jalapeño valves are available for customers requiring configurations not available as a LoPro™ Jalapeño product. |
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Heated Ball Valves For Vacuum Use |
Heated Vacuum Ball Valves have been designed such that the valve body and actuator are separated by an elongated actuator shaft, allowing the entire valve to be heated and insulated to prevent heat loss. The unique ball valve heater covers the entire valve body as well as the stainless steel flange clamps on each end of the valve body. The heater provides complete coverage of the valve, preventing heat loss and maximizing temperature stability inside the valve. |
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Jalapeño LoPro™ Low-Profile Heated Valves |
Jalapeño LoPro™ heated vacuum valves are specifically designed to withstand high internal temperatures, limiting contaminant buildup and reduce system maintenance. The standard heater for the Jalapeño LoPro™ valve is set to 170°C to achieve a nominal interior temperature of 150°C, but other temperature ranges are optional. From room temperature, the heaters typically reach their set temperature in less than 30 minutes and can be daisy-chained with integral locking connectors. The heaters are wired in parallel and are independently controlled. Jalapeño LoPro™ valves use up to four heat zones, reducing any potential for hot and cold spots. Since each heater is designed to uniformly heat a component, there is no need for costly controllers or thermocouples with messy wires. |
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150/160 & V-100 Series Standard Single Stage |
MKS Standard Series Vacuum Valves are designed to insure product quality, reliability, and value. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional O-ring shaft sealed valve. These legacy valves are supported by MKS for configurations not supported by the LoPro™ product line. For increased cycle life and reduced size, please see the MKS LoPro™ products. |
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Two-Stage Series Standard, "soft-start" |
MKS Two-Stage valves achieve a soft pumpdown and vacuum system isolation in one common housing. A small bypass valve is integrated into the main isolation valve, simplifying setup and reducing costs. With the integrated soft pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage. The bypass valve can be user adjustable by selecting a micrometer or thumb screw adjustment option. Additionally, a fixed flow orifice can be sized for the application that is housed internal to the valve to prevent unwanted adjustment. These legacy valves are supported by MKS for configurations not supported by the LoPro™ product line. For increased cycle life and reduced size, please see the MKS LoPro™ Two-Stage products. |
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IDA™ In-situ Diagnostics Access |
MKS IDA™ (In-situ Diagnostics Access) Valves are a multi-purpose, multi-port, dual valve designed to replace the standard isolation valve used in capacitance manometer and other types of gauge isolation in the semiconductor industry. The IDA™ Valve increases accuracy and reduces the time needed for gauge or capacitance manometer zeroing and calibration during preventative maintenance intervals. It also provides a safe, controlled, cost-effective process chamber access port for additional functions, such as system leak checks and diagnostics. |
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High Flow Valves (HFV) High Conductance, Large Port |
MKS High Flow Valves (HFV) are high conductance vacuum isolation valves for use with large line diameters. A welded stainless steel bellows allows for maximum stroke length and high conductance. The small diameter welded bellows also allows the reduction in size for the bonnet mounting while maintaining valve serviceability. The High Flow Valve uses a pulled Stainless Steel body and Aluminum sealing plate for weight reduction. |
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Integrated LoPro™ Low-Profile, Integrated "soft-start" |
MKS Integrated LoPro™ (ILP) valves are pneumatically actuated isolation valves with a bypass valve integrated internally to the main valve. The main valve is a normally closed bellows sealed valve. The bypass valve is a normally closed O-ring shaft sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure defined by the users control sequence. In the second stage, the main valve opens, allowing use of full pumping speed. |
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Series 225 AUTO-SOFT Automatic Soft Starts |
The MKS Series 225 Auto-Soft is a flow actuated check valve used for throttling roughing pumps during initial evacuation. Auto-Soft check valves close very quickly at the start of system evacuation and open automatically upon reaching a set pressure differential. This leaves the pumping line open for the balance of the pumping process. |
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Rapid Isolation Valve System Protection |
MKS Rapid Isolation Valves offer extremely fast closing speeds to protect the vacuum system during a backpressure event caused by pump failure. Many valves do not close fast enough to prevent particles and turbulence from moving upstream and damaging the process. Rapid Isolation Valves are based on popular MKS Vacuum Isolation Valves and are modified to achieve the rapid closing speeds. The table lists expected time improvements for valve closing speeds. |
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Series 145 Vacuum Sentry | MKS Series 145 Vacuum Sentry® is a patented safety valve that protects a vacuum system in the event of a power failure by isolating the vacuum system and venting the mechanical pump. The Vacuum Sentry protects vacuum systems from oil backstreaming via the pump. A small orifice vents the mechanical pump slowly to atmospheric pressure for easy restart when power returns. |
