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Downstream Valves

Butterfly/Throttle Valves with Integrated Controllers

Image Model Description
T2BA EtherCAT Exhaust Throttle Valve - click to enlarge T2B EtherCAT® Exhaust Throttle Valve The T2B EtherCAT® Exhaust Throttle Valve builds on the reliability and performance of the T3B product line and offers fully ETG-compliant EtherCAT communications. The T2B is available in a range of sizes and configurations. The T2B ensures precise and repeatable pressure control for advanced semiconductor and thin film processes.
photo - T3B High Speed Exhaust Throttle Valve T3B High Speed Exhaust Throttle Valve
The T3B High-speed Exhaust Throttle Valves are specifically designed for high-performance pressure control in semiconductor and thin film processes. The T3B is available in a wide range of sizes, configurations, and I/O Protocols. The T3B offers robust, reliable, and accurate pressure control even in the most difficult applications.
photo - 683B 683B "Smart" Exhaust Throttle Valve for DeviceNet™ Networks The MKS 683 Intelligent Exhaust Throttle Valve is specifically designed for computer integrated applications where a simple pressure control system is desired. The 683B "Smart" Exhaust Throttle Valve integrates all control, communication, and driver circuits via a compact "add-on" electronics module onto an MKS 253 Throttle Valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The second generation PID control algorithm can be tuned to drive the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The loop tuning parameters are completely adjustable to accommodate variations in system parameters.
photo - 153D Smart Exhaust Throttle Valve 153D "Smart" Exhaust Throttle Valve Specifically designed for computer-controlled applications where a simple pressure control system is desired, the 153D "Smart" Exhaust Throttle Valve integrates all control, communication, and driver circuits via a compact "add-on" electronics module within a 253 Throttle Valve assembly, eliminating the need for a separate pressure control electronics module. The 153 is operable in two modes, flapper positioning or pressure control.

 

Butterfly/Throttle Valves with Remote Controllers

Image Model Description
photo - 253B Exhaust Throttle Valve 253B Exhaust Throttle Valve
The MKS 253 Exhaust Throttle Valve regulates the removal of gas from a processing system. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a patented non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. The Type 253 is available in standard sizes and flange styles and is compatible with all MKS throttle valve controllers.
photo - 653 B Exhaust Throttle Valve with High-Speed Motor/Gear Assembly 653B Exhaust Throttle Valve with High-Speed Motor/Gear Assembly The 653's high speed motor and gear/driver assembly provides fast response to a given set point to quickly achieve desired pressure and increase system throughput. High accuracy is attained by microstepping the flapper to give more precise control, and no drift, of pressure at the desired set point. The 653 has sufficient torque to operate sealing valves up to four inches and non-sealing valves to 12 inches to prevent clogging from contamination build-up. The valve body can be heated up to 150°C (using optional sealing materials) for operation in high temperature applications and processes. The 653 has a flapper position indicator to identify valve angle during system troubleshooting, is available in a variety of sizes and flange styles, and is compatible with MKS 651 and 1651 controllers.
photo - 651C Digital/Analog Pressure Controller 651C Digital/Analog Pressure Controller The MKS 651 Self-tuning/Digital PID Valve Controller drives MKS 653 or 253 Exhaust Throttle Valves with speed and precision. Its self-tuning algorithm brings the system to set point faster than conventional controllers, and ensures repeatable process recipes without operator involvement. The self-tuning function determines optimal control parameters for any set point in the range of the valve by learning time constants, transfer functions of the valve and plumbing, valve gain, and other important parameters.
photo - 1651C Displayless Digital Pressure Controller 1651C Displayless Digital Pressure Controller The MKS Instruments 1651 is a self-tuning, displayless pressure controller which operates from user-supplied ±15 VDC input power. Its compact size allows for installation anywhere on the process system, saving valuable rack space. The 1651 can be commanded through RS-232 communications, or it will accept an analog set point for pressure or position control. Alternately, there are five preprogrammable pressure or position set points which can be selected via TTL signals. It is fully compatible with the electrical signals, connectors, and software of the MKS 651 Controller. The self-tuning algorithm determines optimal control parameters for any set point in the range of the valve by learning time constants, transfer functions of the valve and plumbing, valve gain, and other important parameters.